Microchips for future smart devices – Pioneering work by Mikko Ritala’s research group and ASM Microchemistry

The University of Helsinki and the Dutch-based company ASM have been working together on successful projects for 20 years. It has also enabled establishing an ALD Center of Excellence in Kumpula, which is hoped to attract talent to Finland.
What it's all about
  • Chemistry PhD students and postdoctoral researchers are developing new atomic layer deposition (ALD) processes for ASM Microchemistry.
  • These can be used to make efficient, small and inexpensive microelectronics.
  • In 2022, the collaboration reached a new level when ASM doubled its funding to the University.
The efficiency of electronics is growing at a furious pace

When a new, more powerful phone or computer hits the shelves, it might be based on the work of researchers at the University of Helsinki. After all, every smart device contains tiny thin films made with atomic layer deposition – and Professor Mikko Ritala and his team are among the world leaders in developing this technique.
 

ALD plays an absolutely central role in today's microelectronics manufacturing, and its importance is growing all the time.

         Mikko Ritala, Professor, University of Helsinki


Thanks to these thin films, the memory and performance of phones can be improved. New innovations in atomic layer deposition, or ALD, are constantly needed. According to Moore's law, the capacity of microchips doubles every two years.

“Compared to the computer used on the Apollo 11 mission in 1969, today's smartphones have several million times more memory and are thousands of times faster,” says Ritala.

Atomic layer deposition was invented in the 1970s by Finnish researcher Tuomo Suntola. The University of Helsinki has been developing the technology for more than 30 years, much of that time in close cooperation with the Dutch-based company ASM, which makes equipment for thin-film production. With funding from the company, the PhD researchers are developing pioneering ALD processes that can be used not only in traditional smart devices but also in applications such as solar cells.

“Some of our results are made available to the public through microelectronics. But we don't know which results or where, as these are trade secrets between companies,” Ritala says.

Collaboration enables taking risks

With a university partner, ASM has access to fundamental research that generates new knowledge. This research won't lead immediately to applications – but it is essential for taking the leap towards the next generation of electronics. Together with the University, the company can also launch projects that involve more risk.

“Creating new things must start with science,” says Marko Tuominen, Director of ASM Microchemistry, the Group's Finnish subsidiary.

Everyday life is made smoother by the fact that the company moved into the Chemicum building on Kumpula Campus in 2004. Renting research equipment from the University is easy, and samples can even be delivered to the lab right next door. Currently, ASM is interested in the University's new LEIS device, a system co-funded by the company, which opens fascinating analytical possibilities. 

Being under the same roof also allows for ex tempore meetings.

“If there's something urgent to discuss, it's easy to send an email and suggest meeting for coffee in 15 minutes,” says Charles Dezelah, Executive Technologist of ASM Microchemistry.

Co-operation speeds up our development significantly. Many non-working processes have been screened out effectively because of the extensive experience and knowledge at the University.
ASM is interested in recruiting talent

Joining forces also benefits scientists. ASM helps them to orient their work by telling them what materials will be needed in microelectronics in a few years' time. For some researchers, the collaboration even opens up a new career path: the company has already employed several members of Ritala's team. 

“It has been an excellent recruitment tool for us,” says Dezelah.

Over the years, a relationship of trust has also developed between the parties. Both understand each other's views, and it is easy to agree on issues such as the publication of results.

“ASM trusts this cooperation, which makes it easy to enhance it and get more results,” Tuominen states.

A top unit that boosts Finland's attractiveness

In 2022, ASM more than doubled its funding to the University, allowing the Ritala team to hire nine researchers. This is expected to double the number of new ALD processes. At the same time, a new ALD Center of Excellence was established in Kumpula, which the partners now want to make a major attraction in Finland.

“I definitely think it will draw new talent,” says Tuominen.

According to Dezelah, advanced research at the University of Helsinki has already attracted employees from abroad to ASM Microchemistry. Even he himself was aware of the collaboration when he decided to move to Finland in 2019. 

“I would say there are less than five research teams in the world that are on the same level as the team at the University of Helsinki.”

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Cooperation in a nutshell

The HelsinkiALD team, led by Professor Mikko Ritala and Professor Matti Putkonen, is developing pioneering atomic layer growth processes for the ASM group, a global company with 4,500 people across 15 key locations. ALD can be used to produce thin films that make phones and computers more efficient. The films are also needed for medical devices and electric vehicles as well as driving AI and sustainable development. Research topics will be jointly selected. Finally, ASM patents the best results, and the researchers publish them. After the current contract period, the company will have funded 117 researcher-years at the University of Helsinki.

 

More information

Mikko Ritala, Professor, University of Helsinki

Marko Tuominen, Director, ASM Microchemistry Oy